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InstantHMI^® for SECS
converts Palm handhelds into a powerful yet simple Human Machine Interface for SEMI equipment.  Connect the Palm to the SECS port (using a serial cable or our wireless infrared kit) and voila!, you have a low cost SECS interface to monitor/capture Equipment Constants, Wafer Histories, Recipes etc. in the Palm for transfer to Microsoft Excel on a Windows PC.

Easy to use interface

The InstantHMI for SECS interface consists of a simple menu screen giving the operator the ability to upload and download ‘Process Recipes’, monitor the ‘Equipment Status’, and perform communication ‘Diagnostics’ and configure communications.

Process Recipes

Selecting the Process Recipes menu item will allow the operator to view the Equipment Process Program Directory (EPPD). The operator may then select a recipe and transfer it to the Palm handheld or select a previously downloaded recipe and transfer it to the SECS equipment. This can be useful for transferring recipes between equipment.

Equipment Status

Equipment Status Selecting the Equipment Status menu item will allow the user to view the online state of Status Variables and Equipment Constants.

Diagnostics 

The Diagnostics menu item helps in troubleshooting communication problems. Helpful functions are ‘Are You There’ and ‘Loopback Request’. The ‘Are You There’ function allows you to determine if the equipment is online and is able to communicate. The ‘Loopback Request’ allows you to enter a text string to send to the equipment. If communications are working properly the equipment will reply with the same text sent to the equipment.